Diborane, Boroethane, Boron hydride, Diboron hexahydride, B2H6, CAS# 19287-45-7

Informational Websites

NumberWebsite
1https://en.wikipedia.org/wiki/Diborane
2https://www.wonderwhizkids.com/conceptmaps/Diborane.html

Where to buy

NumberVendorLink
1Sigma-Aldrich, Co. LLCDiborane 99.99% (diborane only), 9-11% (balance hydrogen), 10% in hydrogen, electronic grade

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberCompositionTitle
1WNInvestigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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