Trimethyl phosphate, TMP, (MeO)3PO , CAS# 512-56-1

Where to buy

NumberVendorLink
1Strem Chemicals, Inc.Trimethylphosphate, min. 97%

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberCompositionTitle
1AlPxOyAtomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
2FePO4Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
3LiPONAtomic Layer Deposition of the Solid Electrolyte LiPON
4LiPONSolid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
5TiP2O7Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
6ZnPO4Plasma-enhanced atomic layer deposition of zinc phosphate

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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