3DMAS, Tris(DiMethylAmido)Silane, CAS# 15112-89-7

Where to buy

NumberVendorLink
1Strem Chemicals, Inc.Tris(dimethylamino)silane, 99+%
2Strem Chemicals, Inc.Tris(dimethylamino)silane, 99+%, contained in 50 ml cylinder for CVD/ALD

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 42 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberCompositionTitle
1AlSixOyBand offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy
2AlSixOyComposite materials and nanoporous thin layers made by atomic layer deposition
3AlSixOyNanoporous SiO2 thin films made by atomic layer deposition and atomic etching
4HfSiOxAnnealing behavior of ferroelectric Si-doped HfO2 thin films
5HfSiOxEffect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
6HfSiOxFerroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
7HfSiOxInfluence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
8HfSiOxOptical properties and bandgap evolution of ALD HfSiOx films
9HfSiOxTaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
10HfSiOxThe effects of layering in ferroelectric Si-doped HfO2 thin films
11SiAlNPlasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
12SiNxCorrelation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
13SiNxPlasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
14SiNxSilicon Nitride and Silicon Oxide Thin Films by Plasma ALD
15SiNxSteady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction
16SiNxThermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
17SiO2Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
18SiO2Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics
19SiO2Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
20SiO2Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer
21SiO2Comparative study of ALD SiO2 thin films for optical applications
22SiO2Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
23SiO2Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
24SiO2High-Reflective Coatings For Ground and Space Based Applications
25SiO2Index matching at the nanoscale: light scattering by core-shell Si/SiOx nanowires
26SiO2Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
27SiO2Irradiation effects of graphene-enhanced gallium nitride (GaN) metal-semiconductor-metal (MSM) ultraviolet photodetectors
28SiO2Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
29SiO2Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
30SiO2Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
31SiO2Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors
32SiO2Optical properties and bandgap evolution of ALD HfSiOx films
33SiO2Photoluminescence and electroluminescence from Ge/strained GeSn/Ge quantum wells
34SiO2Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
35SiO2Poly-Si gate electrodes for AlGaN/GaN HEMT with high reliability and low gate leakage current
36SiO2Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
37SiO2Single-Cell Photonic Nanocavity Probes
38SiO2Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides
39SiO2Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO2 and β-Ga2O3 (2̅01)
40SiO2Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction
41SiO2Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
42SiO2Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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