palladium(II) hexafluoroacetylacetonate, Pd(hfac)2, CAS# 64916-48-9

Where to buy

NumberVendorRegionLink
1EpiValenceπŸ‡¬πŸ‡§Palladium hexafluoroacetylacetonate
2Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈPalladium(II) hexafluoroacetylacetonate, min. 95%

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
2In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
3Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
4Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
5Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
6Tuning size and coverage of Pd nanoparticles using atomic layer deposition
7Plasma-Assisted Atomic Layer Deposition of Palladium
8Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas