TEMAHf, tetrakis(ethylmethylamido) Hafnium, hafnium ethylmethylamide, (EtMeN)4Hf, CAS# 352535-01-4

Where to buy

NumberVendorRegionLink
1Strem Chemicals, Inc.🇺🇸Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr)
2Gelest🇺🇸Hafnium Tetrakis(Ethylmethylamide)
3DOCK/CHEMICALS🇩🇪Tetrakis(ethylmethylamido)hafnium
4Strem Chemicals, Inc.🇺🇸Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr), contained in 50 ml cylinder for CVD/ALD
5Pegasus Chemicals🇬🇧Tetrakis(ethylmethylamido)hafnium(IV)
6Ereztech🇺🇸Tetrakis(ethylmethylamino) hafnium

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 84 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
2Effect of Nitrogen Incorporation in HfO2 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
3Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
4Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
5Excellent resistive switching properties of atomic layer-deposited Al2O3/HfO2/Al2O3 trilayer structures for non-volatile memory applications
6Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
7Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
8Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure
9The effect of atomic layer deposition temperature on switching properties of HfOx resistive RAM devices
10Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
11Trapped charge densities in Al2O3-based silicon surface passivation layers
12Breakdown and Protection of ALD Moisture Barrier Thin Films
13Characteristics of Thin Hf-Silicate Gate Dielectrics after Remote N2 and N2O Plasma Post-Treatments
14Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
15The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces
16Characteristics of Thin Hf-Silicate Gate Dielectrics after Remote N2 and N2O Plasma Post-Treatments
17On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
18Ultrasensitive Detection of 2,4-Dinitrophenol Using Nanowire Biosensor
19Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
20Optical properties and bandgap evolution of ALD HfSiOx films
21Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights
22Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface
23Simulation and Fabrication of HfO2 Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD
24Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
25In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential
26Symmetrical Al2O3-based passivation layers for p- and n-type silicon
27Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
28Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
29Improvement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma
30Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
31Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition
32Total-dose radiation response and and post-irradiation annealing response of Hafnium capacitors
33HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition
34Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
35Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
36Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System
37Plasma Enhanced Atomic Layer Deposition Passivated HfO2/AlN/In0.53Ga0.47As MOSCAPs With Sub-Nanometer Equivalent Oxide Thickness and Low Interface Trap Density
38Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition
39Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition
40Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
41Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
42Resistive switching in HfO2-based atomic layer deposition grown metal-insulator-metal structures
43Distribution and coverage of 40 nm gold nano-particles on aluminum and hafnium oxide using electrophoretic method and fabricated MOS structures
44Correlation between ferroelectricity and ferroelectric orthorhombic phase of HfxZr1-xO2 thin films using synchrotron x-ray analysis
45Improvement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma
46Influence of plasma-based in-situ surface cleaning procedures on HfO2/In0.53Ga0.47As gate stack properties
47Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors
48Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer
49Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
50Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights
51Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
52Interfacial Layer Properties of HfO2 Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon
53Effect of NH3 plasma passivation on the electrical characteristics of a nanolaminated ALD HfAlO on InGaAs MOS capacitor
54Plasma-Assisted Atomic Layer Deposition of Conductive Hafnium Nitride Using Tetrakis(ethylmethylamino)hafnium for CMOS Gate Electrode Applications
55Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
56Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
57Optical properties and bandgap evolution of ALD HfSiOx films
58Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
59Sub-0.5 nm Equivalent Oxide Thickness Scaling for Si-Doped Zr1-xHfxO2 Thin Film without Using Noble Metal Electrode
60Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection
61An improvement of HfO2/Ge interface by in situ remote N2 plasma pretreatment for Ge MOS devices
62Interfacial, Electrical, and Band Alignment Characteristics of HfO2/Ge Stacks with In Situ-Formed SiO2 Interlayer by Plasma-Enhanced Atomic Layer Deposition
63Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
64Pt Nanocrystals Embedded in Remote Plasma Atomic-Layer-Deposited HfO2 for Nonvolatile Memory Devices
65Hot Carrier Filtering in Solution Processed Heterostructures: A Paradigm for Improving Thermoelectric Efficiency
66Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition
67Effects of rapid thermal annealing on the properties of HfO2/La2O3 nanolaminate films deposited by plasma enhanced atomic layer deposition
68Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
69Room-Temperature Atomic Layer Deposition of HfO2 By Using Remote Plasma Source
70Interface engineering of ALD HfO2-based RRAM with Ar plasma treatment for reliable and uniform switching behaviors
71Plasma assisted atomic layer deposited hafnium oxide films for silicon surface passivation
72Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
73Sub-0.5 nm Equivalent Oxide Thickness Scaling for Si-Doped Zr1-xHfxO2 Thin Film without Using Noble Metal Electrode
74Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique
75Sub-10-nm ferroelectric Gd-doped HfO2 layers
76Effect of hydrogen participation on the improvement in electrical characteristics of HfO2 gate dielectrics by post-deposition remote N2 , N2/H2, and NH3 plasma treatments
77Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights
78The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
79Enhanced interfacial reaction of precursor and low temperature substrate in HfO2 atomic layer deposition with highly Ar diluted O2 plasma
80Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
81A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
82The Influence of Technology and Switching Parameters on Resistive Switching Behavior of Pt/HfO2/TiN MIM Structures
83Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
84Interface effect on dielectric constant of HfO2/Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition