TBTDEN, Tris(diethylamido)(tert-butylimido)niobium, CAS# 210363-27-2

Where to buy

NumberVendorRegionLink
1Strem Chemicals, Inc.🇺🇸(t-Butylimido)tris(diethylamino)niobium(V), min. 98%
2Ereztech🇺🇸Tris(diethylamido) (tert-butylimido) niobium(V)
3Pegasus Chemicals🇬🇧Tris(diethylamido)(tert-butylimido)niobium

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 18 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
2Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
3Plasma-enhanced atomic layer deposition of superconducting niobium nitride
4Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
5Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
6Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
7A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
8Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
9Atomic Layer Deposition of Niobium Nitride from Different Precursors
10Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
11Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
12Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
13Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
14Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
15Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
16In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
17Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
18Performance of Samples with Novel SRF Materials and Growth Techniques