Your search for plasma enhanced atomic layer deposition publications discussing B2O3 films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process|
|2||Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon|
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: firstname.lastname@example.org
© 2014-2017 plasma-ald.com