Ta2O5 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ta2O5 films returned 16 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
2Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
3Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
4Development of a multianalyte optical sol-gel biosensor for medical diagnostic
5Highly Uniform, Electroforming-Free, and Self-Rectifying Resistive Memory in the Pt/Ta2O5/HfO2-x/TiN Structure
6In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
7Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
8Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
9Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
10Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
11Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
12Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
13Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
14Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
15Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
16Trilayer Tunnel Selectors for Memristor Memory Cells

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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