AlSixOy Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing AlSixOy films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Band offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy
2Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
3Composite materials and nanoporous thin layers made by atomic layer deposition
4Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
5Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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