Your search for plasma enhanced atomic layer deposition publications discussing AlSixOy films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Band offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy|
|2||Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition|
|3||Composite materials and nanoporous thin layers made by atomic layer deposition|
|4||Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition|
|5||Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching|
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