LiPON Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing LiPON films returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
2Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
3Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
4Atomic Layer Deposition of the Solid Electrolyte LiPON