Plasma Study Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Plasma Study films returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
2Development and characterization of an atmospheric pressure plasma reactor compatible with spatial ALD
3Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
4Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth