Ge Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ge films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1GeSbTe deposition for the PRAM application
2Atomic hydrogen-assisted ALE of germanium
3Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
4Atomic layer epitaxy of germanium
5Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium