SENTECH Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using SENTECH hardware returned 17 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
2Analysis of nitrogen species in titanium oxynitride ALD films
3Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
4Atomic Layer Deposition of Al2O3 Thin Films for Metal Insulator Semiconductor Applications on 4H-SiC
5Breakdown and Protection of ALD Moisture Barrier Thin Films
6Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
7Comparative study of ALD SiO2 thin films for optical applications
8Crystalline growth of AlN thin films by atomic layer deposition
9Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
10Flexible, light trapping substrates for organic photovoltaics
11Laminated Al2O3-HfO2 layers grown by atomic layer deposition for microelectronics applications
12Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor
13Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC
14Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments
15Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
16Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
17Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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