Picosun SUNALE R-150B Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Picosun SUNALE R-150B hardware returned 8 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A comparative study of AlN and Al2O3 based gate stacks grown by atomic layer deposition on InGaAs
2A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
3Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
4Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
5MANOS performance dependence on ALD Al2O3 oxidation source
6Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications
7Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
8Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com