Beneq TFS-500 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Beneq TFS-500 hardware returned 9 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Breakdown and Protection of ALD Moisture Barrier Thin Films
2GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
3High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
4Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
5Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
6Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
7Plasma-Assisted Atomic Layer Deposition of Al2O3 at Room Temperature
8Properties of AlN grown by plasma enhanced atomic layer deposition
9Silicon surface passivation with atomic layer deposited aluminum nitride

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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