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Marko Vehkamäki Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Marko Vehkamäki returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study |