Your search for plasma enhanced atomic layer deposition publications authored by Alexei O. Orlov returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions|
|2||Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier|
|3||Single-electron transistors featuring silicon nitride tunnel barriers prepared by atomic layer deposition|
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