Hao Van Bui Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hao Van Bui returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System
2Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
3Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films