Elisabeth Blanquet Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Elisabeth Blanquet returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1PEALD ZrO2 Films Deposition on TiN and Si Substrates
2Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition
3Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications
4Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient