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M. J. Kirkham Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by M. J. Kirkham returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor |