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Hyung-Sang Park Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Hyung-Sang Park returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP) |
| 2 | Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin Films |