Veli-Matti Airaksinen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Veli-Matti Airaksinen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Properties of AlN grown by plasma enhanced atomic layer deposition
2GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride