Inductively Coupled Plasma Sources for ALD and Surface Engineering

Plasma ALD, LLC develops modular inductively coupled plasma sources designed for integration into atomic layer deposition and other advanced surface treatment systems.

Contact About

We are currently looking for beta test sites for our 300W inductively coupled plasma source.

If you are interested in testing our ICP source with your application and you are not too far from Boston, MA, USA please email marksowa@plasma-ald.com.

If your plasma source needs differ from what is shown here, contact us. Our plasma source experience and design capabilities extend beyond this initial product offering.

The plasma enhanced atomic layer deposition publication database is located here.