Film Stress Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Film Stress returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
2High-Reflective Coatings For Ground and Space Based Applications
3Plasma enhanced atomic layer deposition of SiNx:H and SiO2
4Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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