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Tert-Butylimido,Tris(diMEthylamino)Tantalum, Ta[N(CH3)2]3[=NC(CH3)3], TBTMET, TBTDMT, CAS# 69039-11-8
Where to buy
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | Strem Chemicals, Inc. | 🇺🇸 | t-Butylimidotris(dimethylamino)tantalum(V), min. 98% |
| 2 | Strem Chemicals, Inc. | 🇺🇸 | t-Butylimidotris(dimethylamido)tantalum(V), min. 98%, contained in 50 ml cylinder for CVD/ALD |
| 3 | Ereztech | 🇺🇸 | tert-Butyl imidotris(dimethylamido) tantalum(V) |
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Plasma Enhanced Atomic Layer Deposition Film Publications
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