La2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing La2O3 films returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
2Effect of Thermal Annealing on La2O3 Films Grown by Plasma Enhanced Atomic Layer Deposition
3Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition
4Effects of rapid thermal annealing on the properties of HfO2/La2O3 nanolaminate films deposited by plasma enhanced atomic layer deposition
5Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
6Growth characteristics and electrical properties of La2O3 gate oxides grown by thermal and plasma-enhanced atomic layer deposition
7Resistive switching properties of plasma enhanced-ALD La2O3 for novel nonvolatile memory application


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