Eric W. Deguns Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Eric W. Deguns returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Conformal Fe, Co and Ni Films from Oxides and Nitrides Grown by Atomic Layer Deposition
2Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
3Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor