Frank Greer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Frank Greer returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Fundamental beam studies of radical enhanced atomic layer deposition of TiN
2Fabrication and deformation of three-dimensional hollow ceramic nanostructures