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Aniruddh Shekhawat Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Aniruddh Shekhawat returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films |