Title: Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2
Info: Chem. Commun., 2015, 51, 1341-1344
Density Functional Theory (DFT)
Density Functional Theory (DFT) of SiO2 PEALD with aminosilanes.
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