Ferroelectricity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ferroelectricity returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
2Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors
3Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
4Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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