DMAI, DiMethylAluminum Isopropoxide, Aluminum Dimethyl Isopropoxide, Me2AlOiPr, (CH3)2AlOCH(CH3)2, CAS# 6063-89-4

Where to buy

NumberVendorLink
1Strem Chemicals, Inc.Dimethylaluminum i-propoxide, 98% (99.99+%-Al)
2EpiValenceAluminium dimethyl isopropoxide
3Alfa ChemistryDimethylaluminum i-propoxide
4American ElementsAluminum Dimethyl Isopropoxide

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberCompositionTitle
1Al2O3Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method
2Al2O3Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
3Al2O3Fixed-Gap Tunnel Junction for Reading DNA Nucleotides
4Al2O3Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor
5Al2O3Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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