Bis(Tert-ButylAmido)Silane, BTBAS, CAS# 186598-40-3

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1Strem Chemicals, Inc.Bis(t-butylamino)silane, 97+% BTBAS does not endorse any chemical suppliers. These links are provided for the benefit of our users. If a link goes bad, let us know.

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1SiNxAtomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
2SiNxAtomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
3SiNxAtomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
4SiNxLow-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
5SiNxRedeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
6SiNxRole of Surface Termination in Atomic Layer Deposition of Silicon Nitride
7SiO2Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
8SiO2Designing high performance precursors for atomic layer deposition of silicon oxide
9SiO2Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
10SiO2Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD


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