Your search for plasma enhanced atomic layer deposition publications authored by Seung Wook Ryu returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition|
|2||Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor|
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: firstname.lastname@example.org
© 2014-2018 plasma-ald.com