Seung Wook Ryu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seung Wook Ryu returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
2Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor


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