Peter Munzert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter Munzert returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1High-Reflective Coatings For Ground and Space Based Applications
2Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
3Comparative study of ALD SiO2 thin films for optical applications
4Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material