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Publication Information

Title: Potassium Permanganate-Based Slurry to Reduce the Galvanic Corrosion of the Cu/Ru/TiN Barrier Liner Stack during CMP in the BEOL Interconnects

Type: Journal

Info: ECS J. Solid State Sci. Technol. 2016 volume 5, issue 5, P256-P263

Date: 2016-02-01

DOI: http://dx.doi.org/10.1149/2.0141605jss

Author Information

Name

Institution

Clarkson University

Clarkson University

Clarkson University

Clarkson University

Films

Plasma Ru using Unknown

Deposition Temperature = 330C

0-0-0

7664-41-7

Plasma TiN using Unknown

Deposition Temperature = 330C

3275-24-9

7664-41-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Silicon

SiO2

Keywords

Interconnect

Notes

774

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