Title: Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
Info: Journal of the Korean Physical Society, Vol. 54, No. 3, pp. 1048-1053
Kunsan National University
Gas Phase Species
OES, Optical Emission Spectroscopy
Plasma vs Thermal Comparison
Compared three different ICP sources on the same chamber.
Discusses sample heating from plasma.
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