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Publication Information

Title: Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors

Type: Journal

Info: Phys. Rev. Lett. 15, 448-456, 2016

Date: 2016-03-14

DOI: http://dx.doi.org/10.1109/TNANO.2016.2541859

Author Information

Name

Institution

University of Texas at Austin

University of Texas at Austin

University of Texas at Austin

University of Texas at Austin

University of Texas at Austin

University of Texas at Austin

University of Texas at Austin

University of Texas at Austin

Films

Deposition Temperature Range N/A

15112-89-7

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

815

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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