Surface Recombination Velocity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Surface Recombination Velocity returned 18 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
2Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
3Excellent surface passivation of crystalline silicon by ternary AlxMg1-xOy thin films
4Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
5Improved understanding of recombination at the Si/Al2O3 interface
6Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells
7Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD
8Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
9Investigation of Atomic Layer Deposition Al2O3 Passivation for Screen-Printed Large-Area Solar Cells
10Passivation effects of atomic-layer-deposited aluminum oxide
11Plasma assisted atomic layer deposited hafnium oxide films for silicon surface passivation
12Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
13Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
14Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
15Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride
16Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
17Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
18Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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