Deposition Kinetics, Reaction Mechanism Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Deposition Kinetics, Reaction Mechanism returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Chemical Reaction Mechanism in the Atomic Layer Deposition of TaCxNy Films Using tert-Butylimidotris(diethylamido)tantalum
2Chemical reactions during plasma-enhanced atomic layer deposition of SiO2 films employing aminosilane and O2/Ar plasma at 50°C
3Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
4Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
5Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
6Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
7Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
8Room-Temperature Atomic Layer Deposition of HfO2 By Using Remote Plasma Source
9Room-Temperature Atomic Layer Deposition of Platinum
10Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon
11RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
12RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor
13RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma
14Theoretical Understanding of the Reaction Mechanism of SiO2 Atomic Layer Deposition

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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