Sign up for news and updates!

Publication Information

Title: Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction

Type: Journal

Info: Journal of Applied Physics 120, 015103 (2016)

Date: 2016-06-21

DOI: http://dx.doi.org/10.1063/1.4955165

Author Information

Name

Institution

Stanford University

Stanford University

Xi'an Jiaotong University

Hewlett-Packard

Stanford University

Stanford University

Hewlett-Packard

Stanford University

Films

Plasma SiNx using Unknown

Deposition Temperature Range N/A

15112-89-7

7727-37-9

Plasma SiO2 using Unknown

Deposition Temperature Range N/A

15112-89-7

7782-44-7

Plasma Al2O3 using Unknown

Deposition Temperature Range N/A

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thermal Conductivity

Custom

Custom

Density

XRR, X-Ray Reflectivity

PANalytical Xpert PRO MRD X-ray Diffractometer

Images

SEM, Scanning Electron Microscopy

Unknown

Substrates

Al2O3

SiO2

Keywords

Nanolaminate

Notes

910

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2018 plasma-ald.com