Ar, Argon, CAS# 7440-37-1

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Al2O3A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al2O3 on GaN based metal oxide semiconductor capacitor
2Al2O3AC-Capacitance Techniques for Interface Trap Analysis in GaN-Based Buried-Channel MIS-HEMTs
3Al2O3Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
4Al2O3Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition
5GrapheneLow-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure
6MoOxPlasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells
7RuEffects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
8SiCOHMethod of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition
9SiNxChallenges in atomic layer deposition of carbon-containing silicon-based dielectrics
10SnO2Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon
11TaNxPlasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects
12TiO2Room temperature atomic layer deposition of TiO2 on gold nanoparticles
13V2O5Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
14ZnSPlasma enhanced atomic layer deposition of zinc sulfide thin films
15ZrO2Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at:


Follow @PlasmaALDGuy Tweet


© 2014-2017