Surface Reactions Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Surface Reactions returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
2Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries
3Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
4Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
5In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
6Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon
7Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
8Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
9Low temperature hydrogen plasma-assisted atomic layer deposition of copper studied using in situ infrared reflection absorption spectroscopy
10Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
11Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
12Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
13Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
14Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source


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