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Authors in the Plasma Enhanced Atomic Layer Deposition Publication Database

The plasma enhanced atomic deposition layer community is a diverse group of scientists and engineers from academia, industry, and governmental institutions looking for new and exciting materials and applications for those materials. Without their constant hard work pushing the boundaries of PEALD knowledge, the discipline would not be expanding as quickly as it has.

This list of authors got too big so I split them up on multiple pages. Select a subset from the list below.


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at:


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